Laser machining characteristics in multi-layer thin film structures.

Atomic layer deposition (ALD): from precursors to thin film structures

The principles of the atomic layer deposition (ALD) method are presented emphasizing the importance of precursor and surface chemistry. With a proper adjustment of the experimental conditions, i.e. temperatures and pulsing times, the growth proceeds via saturative steps. Selected recent ALD processes developed for films used in microelectronics are described as examples. These include depositio...

Laser Micro-Raman Spectroscopy of CVD Nanocrystalline Diamond Thin Film

Laser micro-Raman spectroscopy is an ideal tool for assessment and characterization of various types of carbon-based materials. Due to its special optical properties (CrN) coated stainless steel substrates. NCD films have been investigated by laser micro-Raman spectroscopy. The fingerprint of diamond based materials is in the spectral region of 1000-1600 cm-1 in the first order of Raman scatter...

Laser applications in thin - film photovoltaics

We review laser applications in thin-film photovoltaics (thin-film Si, CdTe, and Cu(In,Ga)Se2 solar cells). Lasers are applied in this growing field to manufacture modules, to monitor Si deposition processes, and to characterize opto-electrical properties of thin films. Unlike traditional panels based on crystalline silicon wafers, the individual cells of a thin-film photovoltaic module can be ...

Neural Network Multi Layer Perceptron Modeling For Surface Quality Prediction in Laser Machining

Quadrilateral Micro-Hole Array Machining on Invar Thin Film: Wet Etching and Electrochemical Fusion Machining

Ultra-precision products which contain a micro-hole array have recently shown remarkable demand growth in many fields, especially in the semiconductor and display industries. Photoresist etching and electrochemical machining are widely known as precision methods for machining micro-holes with no residual stress and lower surface roughness on the fabricated products. The Invar shadow masks used ...